# EET320 Semiconductor Processing

College of Technology Engineering Technology Department

**Course Description:** This course provides a broad look at the current state of Microelectronic & Silicon Manufacturing. Students will learn about different fabrication steps such as silicon wafer growth, oxidation, diffusion, ion implantation, rapid thermal processing as well as photo-resist and optical photo-lithography. Various processing techniques are discussed such as vacuum science and plasma process, wet and dry etch processes, evaporation and sputtering process, thin film deposition and CWD (Chemical wafer deposition) process.

**Credit Hours:** 3.00

**Prerequisites:** All of: [EET121](https://www.ecpi.edu/course/EET121 "View EET121")

**Corequisites:** None

## Programs offering this course

- [Electronic Systems Engineering Technology (BS) | Electronic Systems Concentration](https://www.ecpi.edu/programs/electronic-systems-engineering-technology-bachelors-degree)
- [Electronics Engineering Technology (BS) | Electronics Engineering Technology Concentration](https://www.ecpi.edu/programs/electronics-engineering-bachelor-degree)

Learn more about the [programs available at ECPI University](https://www.ecpi.edu/programs).